The Kionix KX Series is a high performance, silicon micro machined, linear accelerometer is based on a sensor element and ASIC packaged in a standard 16-pin SOIC wide body package. The sensor element is fabricated from single crystal silicon with proprietary plasma processes and the element is protected by a silicon cap wafer that is attached at the wafer level and forms a hermetic seal. The sensor element functions on the principle of a differential capacitance component, which utilizes common mode cancellation to decrease errors from process variation and environmental stress.
The element is designed to provide a high signal to noise ratio and will satisfy applications for 2g to 250g ranges. The change of the sensor element capacitance with acceleration is detected and transformed into voltage by a c/v converter that consists of a charge amplifier and an additional switched capacitor integrator that form an electronic feedback circuit implemented in a standard CMOS technology ASIC
MEMS OEM CHIP BASED ACCELEROMETERS
PRODUCT
AXIS OF SENITIVITY
RANGE
SENITIVITY
STANDARD 0g OFFSET
OPERATING VOLTAGE (V)
TEMPERATURE (˚C)
PACKAGE
OUTPUT
DOCUMENTATION
KXTE9 Product Series Ultra Low Power Digital (I2C) with built in Activity-monitoring Algorithm, and Device Orientation Detection Algorithm
KXTE9-1026
Tri-XYZ
2g Standard (+/-1.5g to +/-6g available)
16 counts/g
32 counts/g
2.6 standard (1.8 - 3.6 available)
-40 to +85
3x3x0.9mm LGA
I2C
Datasheet
Product Specs
KXTE9-2050
Tri-XYZ
2g Standard (+/-1.5g to +/-6g available)
16 counts/g
32 counts/g
3.3 standard (1.8 - 3.6 available)
-40 to +85
3x3x0.9mm LGA
I2C
Datasheet
Product Specs
KXTE9-4100
Tri-XYZ
2g Standard (+/-1.5g to +/-6g available)
16 counts/g
32 counts/g
1.8 standard (1.8 - 3.6 available)
-40 to +85
3x3x0.9mm LGA
I2C
Datasheet
Product Specs
KXRB5 Product Series Ultra Low Noise Digital (SPI) and Multiplexed Analog
KXRB5-2042
Tri-XYZ
2g Standard (+/-1.5g to +/-6g available)
600 (mV/g)
1.5 V
3.0 standard (2.5 - 5.25 available)
-40 to +85
3x5x0.9mm LGA
Multiplex Analog
Datasheet
Product Specs
KXRB5-2050
Tri-XYZ
2g Standard (+/-1.5g to +/-6g available)
600 (mV/g)
1.5 V
3.3 standard (2.5 - 5.25 available)
-40 to +85
3x5x0.9mm LGA
Multiplex Analog
Datasheet
Product Specs
KXSD9 Product Series Ultra Low Power Digital
KXSD9-1026
Tri-XYZ
User Selectable 2g, 4g, 6g, 8g
819, 410, 273, 205 counts/g
2048 counts
2.6 standard (1.8 - 3.6 available)
-40 to +85
3x3x0.9mm LGA
Digital I2C, SPI
Datasheet
Product Specs
KXSD9-2050
Tri-XYZ
User Selectable 2g, 4g, 6g, 8g
819, 410, 273, 205 counts/g
2048 counts
3.3 standard (1.8 - 3.6 available)
-40 to +85
3x3x0.9mm LGA
Digital I2C, SPI
Datasheet
Product Specs
KXD94 Product Series High Performance Analog
KXD94-2802
Tri-XYZ
+/-10g standard (+/-5g to +/-15g available)
200 (mV/g)
2.5 V
5.0 standard (2.75 - 5.25 available)
-40 to +85
5x5x1.2mm DFN
Multiplex Analog
Datasheet
Product Specs
KXD94-7044
X
+/-13g standard (+/-5g to +/-15g available)
150 (mV/g)
2.5 V
5.0 standard (2.75 - 5.25 available)
-40 to +85
5x5x1.2mm DFN
Multiplex Analog
Datasheet
Product Specs
KXD94-7138
X
+/-5g standard (+/-5g to +/-15g available)
400 (mV/g)
2.5 V
5.0 standard (2.75 - 5.25 available)
-40 to +85
5x5x1.2mm DFN
Multiplex Analog
Datasheet
Product Specs
KXD94-7228
Tri-XYZ
+/-13g standard (+/-5g to +/-15g available)
150 (mV/g)
2.5 V
5.0 standard (2.75 - 5.25 available)
-40 to +85
5x5x1.2mm DFN
Multiplex Analog
Datasheet
Product Specs
KXR94 Product Series High Performance Analog and Digital